The Global 450mm Consortium (G450C) has been driving the effective industry 450mm development. It is co-ordinating test wafer capability supporting development and demonstrating unit process tool performance. The focus is now on improving tools with suppliers to be ready for customer operations.
Giving an update during the recently held Semicon West 2013 at San Francisco, USA, Paul Ferrer, GM, G450C, said that if one looks at the G450C lithography tool roadmap, by 1H-2014, the 300mm coupon, 450mm directed self-assembly and 450mm imprint will be completed. From 2H-2014 to 1H-2015, there will be 193i patterning service at Nikon’s site. Nikon 193i move-in will take place from 1H-2015 to 2H-2016.
Suppliers are developing the 450mm tool set with 10 tools per quarter being delivered to G450C, the global consortium for 450mm fabs. Significant progress has been made in wafer quality and wafer reclaim is almost ready. Automation and carriers are working, and suppliers are co-operating on the key initiatives. Global collaboration is said to be picking up steam.
In the NFX cleanroom, the 450mm OHT is ready for inter-fab transfer. There are nine tools in-fab — two metro, three process, and four stocker, respectively. There will be seven ODD 3Q2013, and 10 tools ODD 4Q2013, respectively.
As for 450mm notchless wafer activities, the key technical results include the backside fiducial marks that have achieved the desired accuracy (3σ = 0.5μm) using existing camera technology. There are design rules of fiducial marks, such as multiple locations (≤ 4) for robustness and speed, different patterns at multiple locations, and off crystal plane, fewer dots and shallower dots to minimize the Si crystal damage.
As for program highlights, there are collected designs from G450C member companies, tool suppliers, and optical detection suppliers. Also, there has been delivery of 300mm test wafers with fiducial marks. G450C has co-ordinated test wafer plans with suppliers. Further, for 450mm silicon wafer readiness, notchless wafers are technically achievable now.
The G450C members include CNSE/Research Foundation, GLOBALFOUNDRIES, Intel, IBM, Samsung and TSMC.